All the articles are in Japanese. Reprint of Technical Reports published in 1989 and 1994 on VAMAS-SCA activity in Japan.
Preface
Kazuhiro Yoshihara・・・・268
Technical Report on Surface Composition Analysis by Auger Electron Spectroscopy (1989)
VAMAS-SCA Technical Working party in Japan・・・・269
1.Introduction
・・・・・・・・・・・・272
2.Optimum Positioning of the Specimen with respect to the CMA
・・・・・・・・・・・・278
3.Quantitative Surface Composition Analysis of Au-Cu Alloy
・・・・・・・・・・・・305
4.Surface Composition Analysis of Co-Ni Alloy
・・・・・・・・・・・・329
5.Surface Composition Analysis of Pt-Ir Alloy
・・・・・・・・・・・・346
6.Development of an Absolute Auger Electron Analyzer
・・・・・・・・・・・・350
7.Appendix
・・・・・・・・・・・・355
8.List of Publications
・・・・・・・・・・・・361
Lectures on Practical Surface Analysis (1994)
VAMAS-SCA Technical Working party in Japan・・・・366
1.Source (electron, X-ray, ion)
Y.Shiokawa, H.Nisawa, A.Kurokawa・・・・371
2.Electron Analyzer
T.Sekine, M.Kato・・・・388
3.Electron Detector
K.Goto・・・・408
4.Sputtering Process
Y.Homma・・・・416
5.Excitation Process
S.Ichimura・・・・423
6.Escape Process
S.Tanuma・・・・433
7.Background (1)
M.Yoshitake・・・・446
8.Background (2)
H.Tokutaka・・・・461
9.Data Processing
S.Fukushima・・・・465
10.Deconvolution
I.Kojima・・・・488
11.Sample Handling
Y.Shichi・・・・496
12.Points on AES Measurements
T.Ohmura・・・・499
13.For Measurement of Correct Spectra
K.Yoshihara・・・・509
Notes on 1st Seminar(1993.2.4)
A.Tanaka, S.Ichimura, S.Tanuma・・・・515
Notes on 2nd Seminar(1993.5.31)
A.Tanaka, S.Tanuma・・・・527