Proceedings of the 7th International Symposium on Practical Surface Analysis (PSA-16)
October 16-21, 2016, Hotel ICC, Daejeon, Korea
Preface
Surface Analysis as a Key Metrology for Advanced IndustriesYeonhee Lee and Kyung Joong Kim・・・・104
Opening Remarks
Opening RemarksTakaharu Nagatomi・・・・105
Prenary Lecture
Novel Applications of Inelastic Background XPS Analysis: 3D Imaging and HAXPES (Invited Review)Sven Tougaard・・・・107
Theory and Simulation
Modeling of Electron Transport in the Surface Region of Solids: Metrology of Quantitative Analysis by Electron Spectroscopies (Invited Review)Aleksander Jablonski・・・・115
Standardization and pre-standardization
Lateral Resolution of Imaging Surface-Analytical Instruments as SIMS, AES and XPS: Application of the BAM-L200 Certi-fied Reference Material and Related ISO Standards (Invited Paper)W. E. S. Unger, M. Senoner, Th. Wirth, S. Bütefisch, and I. Busch・・・・123
Applications I (Metal, Semiconductor, etc)
Low-Voltage Scanning Electron Microscopy as a Tool for Surface Imaging and Analysis of Practical Materials (Invited Paper)Masayasu Nagoshi, Kaoru Sato, and Tomohiro Aoyama・・・・129
Evaluation of Potential Distribution in Channel Region of Amorphous InGaZnO Thin Film Transistor by Bias Applied Hard X-ray Photoelectron Spectroscopy (Paper)
Satoshi Yasuno, Takeshi Watanabe, and Satoshi Ishimatsu・・・・136
Applications II (Green Material, etc)
Multimodal and in-situ Chemical Imaging of Critical Surfaces and Interfaces in Advanced Batteries (Invited Review)C-M. Wang, P. Yan, Z. Zhu, M. H. Engelhard, A. Devaraj, B. L. Mehdi, M. I. Nandasiri, V. Shutthanandan, Vijay Murugesan, and D. R. Baer・・・・141
Applications III (Low Dimensional Materials)
Microscopic Analysis of Graphene and Carbon Nanotube Growth (Invited Review)Y. Homma・・・・151
Novel techniques and instrumentations
Angular Distribution of Secondary Ions under FIB-shave-off Condition -Toward Development of Three-Dimensional Secondary Ion Image System- (Paper)Ashlan Habib, Hiroyuki Asakura, Miku Furushima, So-Hee Kang, Yun Kim, Bunbunoshin Tomiyasu, and Misanori Owari・・・・159
Analysis of the Shape of Cross Sections Developed under Shave-off Condition Sputtering (Paper)
So-Hee Kang, Miku Furushima, Hiroyuki Asakura, Ahsan Habib, Yun Kim, Bunbunoshin Tomiyasu, and Masanori Owari・・・・164
Use of High Energy Collision Induced Dissociation (HE-CID) in TOF-SIMS for Unambiguous Peak Identification and Imaging (Peer-Reviewed Abstract)
S. R. Bryan, G. L. Fisher, J.S. Hammond, R. M. A. Heeren, S. Iida, and T. Miyayama・・・・167
Member of the Committee of PSA-16
・・・・170
Postscript
・・・・173