Proceedings of the 6th International Symposium on Practical Surface Analysis (PSA-13)
November 10-15, 2013, Okinawa convention center, Okinawa, Japan
Preface
Practical results and universal truths in surface analysisS. Hashimoto・・・・154
Prenary Lecture
New Data Resources and Applications for AES and XPS (Invited)C. J. Powell・・・・155
Standardization and pre-standardization
Repeatability of Spectral Intensity Using an Auger Electron Spectroscopy Instrument Equipped with a Cylindrical Mirror Analyzer*A. Kurokawa, S. Terauchi and M. Ito・・・・161
Data analysis and treatment
Estimation of IMFP except for a constant factor using only XPS background-optimized peak intensities and cross sections*M. Jo・・・・166
Novel techniques and instrumentations
Characteristics of Charged Droplet Beams Produced from Vacuum Electrospray (Invited)*S. Ninomiya, Y. Sakai, L. C. Chen and K. Hiraoka・・・・171
Evaluation of Detection Efficiency of Atom Probe Tomography
*M. Morita, M. Karasawa, T. Asaka and M. Owari・・・・177
Direct Depth Measurement Tool of High Aspect Ratio Via-Hole for Three-Dimensional Stacked Devices
*M. Nakamura, H. Kitada and S. Sakuyama・・・・182
Activities of SASJ Working Group
Analysis of TOF-SIMS spectra using quaternary ammonium ions for mass scale calibration*D. Kobayashi, S. Otomo and H. Itoh・・・・187
Applications I (semiconductor, ceramic, metal, etc.)
Identifying of boron in FSW steel samples through SIMS technology (Invited)*J. N. Kim, S. U. Lee, H. D. Kwun, K. S. Shin, C. Y. Kang・・・・192
Excess Volume in Grain Boundary Segregation
*P. Lej.ek, L. Zheng and Y. Meng・・・・198
Comparative Study on Nondestructive and Destructive Meth-ods of Evaluating Thicknesses of Hot-dip Galvanized Coatings
*Y. Higashi and T. Sawada・・・・202
Depth Analysis of Ta/NiFe/Ta/CoFeB/Ta/NiFe Multilayer Thin Films: Comparison of Atom Probe Tomography and Auger Electron Spectroscopy
*M. Kubota, Y. Ishida, K. Yanagiuchi, H. Takamizawa, Y. Nozawa, N. Ebisawa, Y. Shimizu, T. Toyama, K. Inoue and Y. Nagai・・・・207
Reduced Preferential Sputtering of TiO2 using Massive Argon Clusters
*J. D. P. Counsell, A. J. Roberts, W. Boxford, C. Moffitt and K. Takahashi・・・・211
Applications II (bio, organic, composite, etc.)
Degradation of organic silane monolayers on silicon wafer during XPS measurement*H. Yamato, A. Nihei, Y. Kawamura, F. Kurayama, T. Furusawa, M. Sato and N. Suzuki・・・・216
A Synchrotron Radiation Photoelectron Spectroscopic Study on the Oxidation of Si in Diamond-like Carbon Film by Hyperthermal O-atom Beam
*K. Yokota, M. Tagawa, A. Yoshigoe and Y. Teraoka・・・・221
Mechanism of hologram formation on glass surface by recording technique with corona discharge
*D. Kobayashi, Y. Yamamoto, K. Yamamoto, S. Funatsu, K. Harada and J. Nishii・・・・226
Study on interaction between phosphatidylcholine(PC) liposome and gold nanoparticles by TEM observation
*C. Tsukada, T. Tsuji, K. Matsuo, H. Nameki, T. Yoshida and S. Yagi・・・・230
Member of the Committee of PSA-13
・・・・234
Postscript
・・・・237